Airco Temescal Cv-8 Manual

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Temescal E Beam Manual Read/Download Airco Temescal Power Supply and Electron Beam Controller CV8 110View Details Airco. (Airco Temescal CV-8). CV-6SLX TECHNICAL MANUAL Revision F, July 2008 Temescal, a part of Edwards Vacuum, Inc. 4569-C Las Positas Road, Livermore, CA 94551. Temescal, a part of Edwards.

Airco Temescal Cv-8 Manual
Temescal Cv 8 Manual

Airco Temescal Cv-8 Manual

These items are only for end users. 1 4-way Skinner Electric Pneumatic Valve 115v MODEL-V935DX18 Airco Temescal 4″ 2 7766 Airco Temescal 2 Inch 5010 Aluminum Valve H-82 3 Airco / Temescal Model: 8008 Wired Controller. Unused Old Stock 152 Temescal VES 2550 Rebuilt Vacuum System 153 Temescal VES 2550 With New Process Controller 154 Temescal VES-2550 E-Beam Evaporation System with 2 Four Pocket E-Guns 155 Temescal Water Company et al., Petitioners, v.

Temescal Cv 8 Manual

Description Airco Temescal FC-1800 Evaporator Photos: Download OEM: Airco Temescal Model: Temescal FC-1800 Evaporator Description: Airco Temescal FC-1800 Evaporator System with Airco Temescal HV CNTL 14 (SN 175), Serial Number 210, To Include: Power Supply, Control Panel, CTI-Cryopump 8, Part Number 3543811G004, Serial Number Location:San Jose, CA, U.S.A. Please contact us for the availability of the following used semiconductor equipment and parts. [Pls use “ CTRL+F “key button to search the model/ key word you are interested in] The items are subject to prior sale without notice. These items are only for end users. 1 4-way Skinner Electric Pneumatic Valve 115v MODEL-V935DX18 Airco Temescal 4″ 2 7766 Airco Temescal 2 Inch 5010 Aluminum Valve H-82 3 Airco / Temescal Model: 8008 Wired Controller. Unused Old Stock 152 Temescal VES 2550 Rebuilt Vacuum System 153 Temescal VES 2550 With New Process Controller 154 Temescal VES-2550 E-Beam Evaporation System with 2 Four Pocket E-Guns 155 Temescal Water Company et al., Petitioners, v.

Figure 4 – Vent Valve – Located inside the front panel below and to the left of the Bell Jar Base 3. Turn the knob counter clockwise (to your left) to open; you should be able to feel suction at the opposite end of the of the valve opening 4. Check the Cryogenics Temperature Indicator (CTI) located on the right side of the chamber, it should read 12–14oC; if the temperature increases, check the HI VAC valve to make sure it is completely closed. Note: If the HIVAC valve is completely closed and the temperature reads outside of the 12–14oC range; contact support personnel in the clean room immediately for assistance 5.

Continue to turn the valve until a slight whistling sound is heard, this indicates that the chamber pressure is increasing. Once the pressure begins to increase, stop turning the knob and wait approximately 2-3 minutes 6. Once the pressure has reached atmosphere level, completely open the vent valve (counterclockwise) as seen in Figure 4 4. Open the chamber (Figure 5) by moving the lever (indicated by the arrow) forward, or away from you, to raise the Bell Jar.

Figure 6 – Inficon – film thickness monitor 7. Check for the “XTAL” indicator light, if the indicator is blinking, the crystal is bad. Note: If the crystal is bad, it will need to be changed; contact support personnel in the clean room for assistance. If the “XTAL” indicator is not blinking, the crystal is good and ready for use. Place your wafer on the substrate mounting platter and secure it by fastening the metal clips as shown in Figure 7. Note: You need to use the 5/16th inch socket wrench to fasten the clips.

Figure 18 – Inficon – film thickness monitor 1. Press the “Program” button (indicated by the red arrow) 2. Telecharger k2000 saison 2 torrent. Next, press the “Thickness 2” button and enter a value for “Thickness 2” followed by the “Enter” button (highlighted in blue) 3. Press the “Thickness 1” button and enter a value (usually the same as “Thickness 2”) and press “Enter” 4. Next, press the “Time” button and enter a value for “Time” (typically ‘9999’) and press “Enter” 5.

Press the “Density” button and enter a value for “Density” (this depends on the metal you are depositing and should be obtained from the Bulk densities and Z Values table) and press “Enter” 6. Press the “Z Ratio” button and enter a value for “Z Ratio” (again, this depends on the metal you are depositing, obtain from the Bulk Densities and Z Values table) and press “Enter” 7.

Finally, press the “Tooling” button and enter a value for “Tooling” (typically ‘100’), press “Enter” 24. Open the water valve (located behind Indy) by turning the valve to your left until the handle is parallel with the water line as shown in Figure 19. Figure 22 – CV-8 AircoTemescal 1. Turn the Key to the “On” position; the “P.C. Cards & Keylock” and “HV OFF” lights should come on (highlighted in blue) Note: You can zero out on the Inficon by pressing the “Zero” button on the Inficon. On the CV-8, turn the “Emission Control” knob (highlighted in green), located on the right side, to zero 3. Press the “H.V.

ON” button (highlighted in orange) and hold for 1 second 4. Press the “Gun #1 Fil. On” button (highlighted in yellow) 5. Turn the “Emission Control” knob (in green) to desired setting which is dependent on the metal you are depositing 28.

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Look through the window in the bell jar, a light purple glow in the crucible in the chamber indicates the metal is heating up as seen in Figure 23. Figure 25 – Shutter Control (Open) 1. The shutter is controlled by a rubber tube located below the bell jar.

Turn the tube Clockwise (to the right) to open the shutter as seen in Figure 25 and hold it open 32. With the shutter open and out of the way, allow the evaporating metal to deposit onto the substrate to the desired thickness. On the Inficon (Figure 24, page 18), for most metals you should keep your deposition rate at approximately 1-1.5 Angstroms/sec, you will get a more even coating if you run it slowly; to be safe keep it below 2 Angstroms/sec 34.

Continue to hold the shutter open until you reach you desired thickness. Once you are ready to stop depositing metal, perform the following steps: Figure 26 – CV-8 Airco Temescal 1. Press the “H.V. Off” button on the CV-8 Airco Temescal (Figure 26, highlighted in blue) and close the “Shutter” (see Figure 25 – Shutter Control on page 18) at the same time (to close the shutter, turn the tubing counter counterclockwise or to your left) o Turning off the High Voltage stops the electron beam from heating the metal and closing the shutter physically stops any further deposition. Push the “Gun #1 Fil.

Off” button on the Airco Temescal (Figure 26, highlighted in yellow) 3. Return the Emission Control knob to Zero (Figure 26, highlighted in green) 4.

Turn the key on the Airco Temescal to the off position (this disables the high voltage) 5. Turn the “Emis” Ion Gauge off on the Varian (see Figure 16 – Varian SenTorr on page 15) 6. Remove power from the Inficon as seen below in Figure 27 Figure 27 – Inficon 36.

Allow the system to cool for 15-20 minutes. After the system has cooled, turn the “Main Power” off on the “rolling” power supply by flipping the lever down as shown in Figure 28. Figure 28 – Main Power – Rolling Power Supply (Off) 39. Turn off water valve (located behind Indy) by turning the valve to your right until the handle is perpendicular with the water line (Figure 29) Figure 29 – Water Valve (Off) 40. Turn off power at main circuit breaker Figure 30 – Circuit Breaker (Off) 41. Close the HiVac valve (clockwise), it is important to make sure it is completely closed so apply approximately 50 pounds of force to the lever; you want it to be snug but not too tight. Figure 31 – Hi-Vac Valve 42.

Remove the front panel again by pulling downward on the rings and lifting up on the panel (Figure 32). Figure 32 – Front Panel Latches (marked by arrows) 43. Open the “Vent Valve” by turning the knob counter clockwise (or to your left) until you hear a slight “hissing” sound, then turn it two or three more times as seen in Figure 33. Wait for the chamber to vent, the hissing will stop when it has reached Atmospheric pressure.

Figure 33 – Vent Valve (Open) 44. Push the lever forward to open the bell jar (Figure 34). When the bell jar has completely opened you can rotate it to the left out of your way. Figure 34 – Opening the Bell Jar 45. Remove the metal platter from the chamber by lifting it from the three metal prongs on which it is mounted (as seen in Figure 35), and set it on the table to the left of the machine. Figure 35 – Metal Platter 46. Check the glass slides that cover the window of the bell jar, if the slides are no longer transparent, they will need to be replaced.

Close the Bell Jar by pulling the lever backwards (indicated by the red arrow in Figure 36) Figure 36 – Bell Jar in the Closed Position 48. Next, close the Vent Valve by turning it clockwise (right), as seen in Figure 37 Figure 37 – Vent Valve (Close) 49. Open the Roughing Valve by lifting the red toggle protector and metal lever up (Figure 38). Figure 38 – Pneumatic Roughing Valve (Open) 50. Pump the system down to 2E-2 torr (Figure 39 shown in blue). Figure 39 – Varian SenTorr 51. Close Roughing Valve (Figure 40).

Figure 40 – Pneumatic Roughing Valve (Close) 52. End of procedure.